Academic Year/course:
2017/18
447 - Degree in Physics
26941 - Micro- and Nano-Systems
Syllabus Information
Academic Year:
2017/18
Subject:
26941 - Micro- and Nano-Systems
Faculty / School:
100 - Facultad de Ciencias
Degree:
447 - Degree in Physics
ECTS:
5.0
Year:
4 and 3
Semester:
Second semester
Subject Type:
Optional
Module:
---
5.3. Syllabus
Grado (EQF/MECU 6)
5.5. Bibliography and recommended resources
- BB Beeby, S.. MEMS Mechanical Sensors. Artech House, 2004
- BB Brodie, Ivor. The physics of micronano-fabrication. 2nd. ed. Springer, 2010
- BB Kaajakari, Ville. Practical MEMS. Small Gear Pub., 2009
- BB Klein, Dan. CMOS IC Layout : concepts, methodologies, and tools. Newnes, 1999
- BB Lyshevski, S.E.. Nano- and microelectromechanical systems : fundamentals of nano- and microengineering.. 2nd. ed. CRC Press, 2005
- BB Pelesko, John A.. Modeling MEMS and NEMS / John A. Pelesko, David H. Bernstein Boca Raton : Chapman & Hall/CRC, cop. 2003
- BB Saint, Christopher; Saint, Judy. IC Layout Basics: A Practical Guide. McGraw-Hill, 2001
- BB Saint, Christopher; Saint, Judy. IC Mask Design: Essential Layout Techniques. McGraw-Hill, 2002
- BB Varadan, V. K.. RF MEMS and their Applications. Wiley-Blackwell, 2002